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An EPD is a device that measures and monitors process characteristics to determine when a specific threshold or event has been obtained usually to signal the completion of a process or process step
Equipment (through reference to SEMI E78)
Initially available at www
The purpose of this Document is to standardize requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards
FPD用ガラス基板サプライヤは，出荷前にこれらの情報を基板上のOCの周囲1箇所にマークすることで，基板情報管理を簡素化できる。さらに，このマーキングシンボルを使用することで，従来使用しているOCカットの形状の膨大な種類を，将来は削減することが可能になる。
E15200 - SEMI E152 - Specification for Mechanical Features of EUV Pod for 150 mm EUVL Reticles Revision:SEMI E152-0709 - Superseded An EPD is a deviceThis Standard specifies EUV Pod for the 150 mm Extreme Ultraviolet Lithography (EUVL) reticle, used to ship, transport and store a 6 inch reticle. The EUV Pod consists of an outer pod and a protective inner pod. The EUV Pod is to be used when a conventional reticle carrier does not meet the requirements of EUVL. This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and
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